Micromotive - Mikrotechnik > Technologie

<body bgcolor="#FFFFFF" text="#000000"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#FFFFFF"> <tr> <td width="800"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#D3DDFF"> <tr> <td height="20" valign="top" bgcolor="#CCCCCC" width="84"><a href="index.php" target="_top"><img src="Grafiken/Deutsch_d.GIF" width="84" height="20" border="0" name="Deutsch" alt="Deutsch"></a></td> <td valign="middle" width="1" align="right" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td valign="middle" width="55" id="Home" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="index_e.php" target="_top"><img src="Grafiken/Home_d.gif" width="54" height="20" border="0" name="Home" alt="Home"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="81" valign="middle" id="Unternehmen" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Company_e.php" target="_top"><img src="Grafiken/Company_d.gif" width="80" height="20" border="0" name="Company" alt="Company"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="109" valign="middle" id="Mikrotechnik" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Microsystems_e.php" target="_top"><img src="Grafiken/Microsystems_d.gif" width="108" height="20" border="0" name="Microsystems" alt="Microsystems"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="94" valign="middle" id="Technologie" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Technology_e.php" target="_top"><img src="Grafiken/Technology_l.gif" width="93" height="20" border="0" name="Technology" alt="Technology"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="75" valign="middle" id="Produkte" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Products_e.php" target="_top"><img src="Grafiken/Products_d.gif" width="74" height="20" border="0" name="Products" alt="Products"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="66" valign="middle" id="Service" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Service_e.php" target="_top"><img src="Grafiken/Service_d.gif" width="65" height="20" border="0" name="Service" alt="Service"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="67" valign="middle" id="Kontakt" align="center" bgcolor="#CCCCCC"> <p><a href="Contact_e.php" target="_top"><img src="Grafiken/Contact_d.gif" width="67" height="20" border="0" name="Contact" alt="Contact"></a></p> </td> </tr> </table> </td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="56" valign="top"> </td> <td colspan="9" valign="top"> <font face="Arial, Helvetica, sans-serif" size="6" color="#999999">Technology</font> <hr size="2" noshade> </td> <td width="20"></td> </tr> <tr> <td height="20" colspan="2" valign="top"> </td> <td valign="top" align="left" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Processes_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Standard processes</font></a></font></b></font></td> <td valign="top" colspan="2" align="left"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Silicon_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Silicon technology</font></a> </font></b></font></td> <td valign="top" colspan="3"><b><font size="2" face="Arial, Helvetica, sans-serif"><a href="SU8_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Thick film technolog</font></a>y</font></b></td> <td width="146"></td> <td></td> </tr> <tr> <td height="20" colspan="3" valign="top"> </td> <td valign="top" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Microtips_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Microtips</font></a></font></b></font></td> <td valign="top" colspan="2"><font face="Arial, Helvetica, sans-serif" size="2"><b><a href="Ultraflat_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Flat technology</font></a></b></font></td> <td width="130" valign="top"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Microassembly_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Microassembly</font></a></font></b></font></td> <td width="10"></td> <td></td> <td></td> </tr> <tr> <td height="14"></td> <td width="12"></td> <td width="13"></td> <td width="132"></td> <td width="14"></td> <td width="126"></td> <td width="17"></td> <td></td> <td></td> <td></td> <td></td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="20"></td> <td width="600"></td> <td width="20"></td> </tr> <tr> <td height="984"></td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td height="20" valign="middle" width="600"> <h4><font face="Arial, Helvetica, sans-serif">Microtips</font></h4> </td> </tr> <tr> <td height="84" valign="top"> <div align=justify> <font color=#000000 size=2 face="Thaoma, Arial, Helvetica, sans-serif"> <font face="Arial, Helvetica, sans-serif">Micromotive plays a leading role in the production of microtips for example used in the scanning probe microscopy. This comprises pure isotropical etched tips as well as tips with one or more films which have an aperture at the very end of the tip. This allows the modification of tips for different functions.</font></font></div> </td> </tr> <tr> <td height="35" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" valign="top"> </td> <td width="590" height="35" valign="top"> <div align=justify> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"> <b><font face="Arial, Helvetica, sans-serif">Conical tips made of one material</font></b></font></h5> </div> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="298" valign="top"><img src="Grafiken/spt05.jpg" width="215" height="150" alt="Silicon tip"></td> <td width="292" valign="bottom" align="center"><img src="Grafiken/spt02b.jpg" width="292" height="67"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="131" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="96" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif"> Isotropical etched tips can be manufactured out of monocrystaline silicon or amorphous silicon nitride. For silicon tips minimal tip radii of 10 nm can be achieved. Typical radii of nitride tips are in the range of 20-30 nm. Tiphights are in the range of 1 to a few micrometer.</font></div> </td> </tr> <tr> <td height="35" valign="top"> </td> <td valign="top"> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"><b><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"><b><font face="Arial, Helvetica, sans-serif">Conical tips</font></b></font><font face="Arial, Helvetica, sans-serif"> with coating</font></b></font></h5> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="298" valign="top"><img src="Grafiken/spt06.jpg" width="214" height="150" alt="Aperture tips"></td> <td width="292" valign="bottom" align="center"><img src="Grafiken/spt03b.jpg" width="292" height="67"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="125" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="90" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif"> In order to serve various purposes the tip can be coated with different metals or dielectrical material such as silicon oxide and have an aperture at the very end of the tip. The aperture can vary around several 100 nm.</font></div> </td> </tr> <tr> <td height="35" valign="top"> </td> <td valign="top"> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"><b><font face="Arial, Helvetica, sans-serif"> Conical tip with double coating</font></b></font></h5> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="298" valign="top"><img src="Grafiken/spt07.jpg" width="215" height="150" alt="Coaxial tip"></td> <td width="292" valign="bottom" align="center"><img src="Grafiken/spt04b.jpg" width="292" height="67"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="62" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="62" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif"> If the tip is covered with more than one coating, special processes allow the selective opening of the different coatings. </font></div> </td> </tr> </table> </td> </tr> <tr> <td height="17"></td> </tr> </table> </td> <td></td> </tr> <tr> <td height="24"></td> <td></td> <td></td> </tr> </table> </body>