Micromotive Mikrotechnik -> Planare Strukturen: Strukturen ohne Topografie (z.B. für SNOM)

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</td> </tr> <tr> <td width="425" height="640" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" height="640" valign="top" class="Stil8"><p>Als planare Strukturen verstehen wir Strukturen aus unterschiedlichen Materialien, bei denen die Struktur des einen Materials so in ein anderes Material eingelassen ist, dass die Materialien an der Oberfläche bündig abschließen und somit keine Topografie besitzen.</p> <p>Als Materialkombinationen können sowohl verschiedene Metalle wie auch Dielektrika oder Kombinationen aus beiden verwendet werden. Die topografielosen Proben werden als Membran gefertigt und können bei Bedarf auf einen Träger montiert werden.</p> <p> </p> <p><strong>Anwendung:</strong> </p> <p> Anwendung finden topografielose Strukturen z.B. in der Nanoanalytik, wo die zu untersuchenden Objekte bereits kleiner sind als die Topografie konventionell gefertigter Strukturen. Auch in der Mikrofluidik sind Anwendungen denkbar, wenn Strukturen wie beispielsweise Elektroden möglichst geringe fluidische Widerstände aufweisen sollen. </p> <p> </p> <p class="Stil9">Spezifikationen:</p> <ul> <li class="Stil8"> Material: Metalle und Dielektrika</li> <li class="Stil8">Dicke: wenige nm – einige µm </li> </ul> <p> </p></td> </tr> </table></td> <td width="15" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="15" height="640"> </td> </tr> </table></td> <td width="200" valign="top"><table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="200" height="150" valign="top"><p class="Stil9"><img src="Grafiken/Planar.jpg" width="200" height="150"></p> </td> </tr> <tr> <td height="30" valign="top" class="Stil8"><div align="center"> <p>topografielose Probe (REM) </p> </div></td> </tr> <tr> <td height="200" valign="top"><img src="Grafiken/SNOM%20Probe.jpg" width="200" height="200"></td> </tr> <tr> <td height="30" valign="top" class="Stil8"><div align="center">topografielose Probe (SNOM) </div></td> </tr> <tr> <td height="200" valign="top"><img src="Grafiken/SNOM%20Probe%20topo.jpg" width="200" height="200"></td> </tr> <tr> <td height="30" valign="top"><div align="center" class="Stil8">topografielose Probe (AFM) </div></td> </tr> </table></td> </tr> <tr> <td height="162"> </td> <td> </td> <td> </td> </tr> </table></td> <td width="30"> </td> <td width="200">  </td> </tr> <tr> <td height="268"></td> <td></td> <td></td> </tr> <tr> <td height="86"></td> <td> </td> <td></td> <td></td> </tr> </table> </body>