Micromotive - Mikrotechnik > Technologie

<body bgcolor="#FFFFFF" text="#000000"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#FFFFFF"> <tr> <td width="800"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#D3DDFF"> <tr> <td height="20" valign="top" bgcolor="#CCCCCC" width="84"><a href="index.php" target="_top"><img src="Grafiken/Deutsch_d.GIF" width="84" height="20" border="0" name="Deutsch" alt="Deutsch"></a></td> <td valign="middle" width="1" align="right" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td valign="middle" width="55" id="Home" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="index_e.php" target="_top"><img src="Grafiken/Home_d.gif" width="54" height="20" border="0" name="Home" alt="Home"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="81" valign="middle" id="Unternehmen" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Company_e.php" target="_top"><img src="Grafiken/Company_d.gif" width="80" height="20" border="0" name="Company" alt="Company"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="109" valign="middle" id="Mikrotechnik" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Microsystems_e.php" target="_top"><img src="Grafiken/Microsystems_d.gif" width="108" height="20" border="0" name="Microsystems" alt="Microsystems"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="94" valign="middle" id="Technologie" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Technology_e.php" target="_top"><img src="Grafiken/Technology_l.gif" width="93" height="20" border="0" name="Technology" alt="Technology"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="75" valign="middle" id="Produkte" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Products_e.php" target="_top"><img src="Grafiken/Products_d.gif" width="74" height="20" border="0" name="Products" alt="Products"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="66" valign="middle" id="Service" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Service_e.php" target="_top"><img src="Grafiken/Service_d.gif" width="65" height="20" border="0" name="Service" alt="Service"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="67" valign="middle" id="Kontakt" align="center" bgcolor="#CCCCCC"> <p><a href="Contact_e.php" target="_top"><img src="Grafiken/Contact_d.gif" width="67" height="20" border="0" name="Contact" alt="Contact"></a></p> </td> </tr> </table> </td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="56" valign="top"> </td> <td colspan="9" valign="top"> <font face="Arial, Helvetica, sans-serif" size="6" color="#999999">Technology</font> <hr size="2" noshade> </td> <td width="20"></td> </tr> <tr> <td height="20" colspan="2" valign="top"> </td> <td valign="top" align="left" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Processes_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Standard processes</font></a></font></b></font></td> <td valign="top" colspan="2" align="left"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Silicon_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Silicon technology</font></a> </font></b></font></td> <td valign="top" colspan="3"><b><font size="2" face="Arial, Helvetica, sans-serif"><a href="SU8_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Thick film technolog</font></a>y</font></b></td> <td width="146"></td> <td></td> </tr> <tr> <td height="20" colspan="3" valign="top"> </td> <td valign="top" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Microtips_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Microtips</font></a></font></b></font></td> <td valign="top" colspan="2"><font face="Arial, Helvetica, sans-serif" size="2"><b><a href="Ultraflat_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Flat technology</font></a></b></font></td> <td width="130" valign="top"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Microassembly_e.html" style="text-decoration:none; color:#FFFFFF " target="mainFrame"><font color="#000000">> Microassembly</font></a></font></b></font></td> <td width="10"></td> <td></td> <td></td> </tr> <tr> <td height="14"></td> <td width="12"></td> <td width="13"></td> <td width="132"></td> <td width="14"></td> <td width="126"></td> <td width="17"></td> <td></td> <td></td> <td></td> <td></td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="20"></td> <td width="600"></td> <td width="20"></td> </tr> <tr> <td height="955"></td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td height="20" valign="middle" width="600"> <h4><font face="Arial, Helvetica, sans-serif">Silicon technology</font></h4> </td> </tr> <tr> <td height="65" valign="top"> <div align=justify> <font color=#000000 size=2 face="Thaoma, Arial, Helvetica, sans-serif"> <font face="Arial, Helvetica, sans-serif">Isotropical- und anisotropical silicon etch techniques enable the three dimensional structuring of silicon.</font></font></div> </td> </tr> <tr> <td height="35" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" valign="top"> </td> <td width="590" height="35" valign="top"> <div align=justify> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"> <b><font face="Arial, Helvetica, sans-serif">Vertical ditches and walls in silicon</font></b></font></h5> </div> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="273" valign="top"><img src="Grafiken/3DSi05.jpg" width="215" height="150" alt="Vertical structure in silicon"></td> <td width="317"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="131" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="96" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif">By anisotropical deep reactive etching of silicon any structures with dimensions even below 1 µm with vertical side walls can be generated. That is how aspect ratios for ditches of up to 5 and such for walls bigger than 10 can be reached.</font></div> </td> </tr> <tr> <td height="35" valign="top"> </td> <td valign="top"> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"><b><font face="Arial, Helvetica, sans-serif">Multistep structures with vias</font></b></font></h5> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="310" valign="top"><img src="Grafiken/3DSi07.jpg" width="202" height="150" alt="Multistep silicon structure"></td> <td width="280" valign="middle" align="center"><img src="Grafiken/3DSi03.gif" width="200" height="120"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="116" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="81" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif"> The 3D-silicontechnology makes it possible to realize multistep structures and others with vias. The ultimate hight can be about 1 mm.</font></div> </td> </tr> <tr> <td height="35" valign="top"> </td> <td valign="top"> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"><b><font face="Arial, Helvetica, sans-serif">Isotropical etched structures</font></b></font></h5> </td> </tr> </table> </td> </tr> <tr> <td height="170" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="150" valign="top"> </td> <td width="310" valign="top"><img src="Grafiken/3DSi06.jpg" width="203" height="150" alt="Isotropical etched silicon structure"></td> <td width="280"></td> </tr> <tr> <td height="20"></td> <td></td> <td></td> </tr> </table> </td> </tr> <tr> <td height="62" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="62" valign="top"> </td> <td width="590" valign="top"> <div align=justify> <font size="2" face="Arial, Helvetica, sans-serif"> Apart from the structures with the vertical walls we can also fabricate them with concave walls which can be applied to microfluidic structures. </font></div> </td> </tr> </table> </td> </tr> <tr> <td height="16"></td> </tr> </table> </td> <td></td> </tr> <tr> <td height="10"></td> <td></td> <td></td> </tr> </table> </body>