SU-8 as a photosensitive plastics is used in a wide range of micro technological applications. Components made of SU-8 can be customized with almost vertical side walls and very high aspect ratios. In lateral dimensions almost all designs are possible. More complex parts can be patterned by a multilevel design.
Important properties of SU-8 are its optical transparency, high chemical resistance and mechanical stability.
Application:
Due to freedom of design and optical transparency, optical elements such as waveguides, couplers or splitters can be customized with SU-8 easily.
The mechanical properties of the material also allows the realization of mechanical elements such as grippers, gears, levers, springs, wires, etc.
A very common application of SU-8 is the use as electroplating mold for the production of metallic micro parts.
The good chemical resistance allows the realization of microfluidic components too. |
