Micromotive MEMS -> Electron optics: Electron optical grids, Electrodes, Electron emitter

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width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1164"> </td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td width="640" height="92" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="40" colspan="8" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>    Electron optics</b></font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="8"> <hr size="2" noshade> </td> </tr> </table> </td> </tr> <tr> <td height="310" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong>Gratings as elements for electron optics:</strong> </p> <p class="Stil8">For the acceleration of free electrons in vacuum or to build up energy filters gratings are used in electron optics. The micro fabricated electron meshes provide the advantage that they allow high electron transmission by very small bars.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Minimum bar width: about 1µm </li> <li class="Stil8">Maximum diameter: ~100 mm</li> <li class="Stil8">Material: e.g. Silicon, Copper, Gold</li> </ul> <p class="Stil8">Technology and competencies</p> <ul> <li class="Stil8"><a href="photolithography.php" target="_top">Photo lithography</a></li> <li class="Stil8"> <a href="silicon grids.php" target="_top">Silicon grids</a></li> <li class="Stil8"> <a href="thin film deposition.php" target="_top">Micro electroplating</a> </li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="164" valign="top"><br> <img src="Grafiken/Goldgrid.jpg" width="200" height="137"></td> </tr> <tr> <td height="146" valign="top" class="Stil8"><div align="center">Electron grid made of Gold </div></td> </tr> </table></td> </tr> <td height="280" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong>Electrodes:</strong></p> <p class="Stil8">To generate desired electrical fields electrode structures are required in electron optics. By micro electroplating we are able to realize complex electrode geometries.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Electrode thickness: a few µm up to some 100 µm </li> <li class="Stil8">Material: e.g. Silicon, Copper, Gold </li> </ul> <p class="Stil8">Technology and competencies</p> <ul> <li class="Stil8"> <a href="photolithography.php" target="_top">Photo lithography</a></li> <li class="Stil8"><a href="silicon microstructures.php" target="_top">Silicon micro parts</a></li> <li class="Stil8"><a href="thin film deposition.php" target="_top">Micro electroplating</a></li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="163" valign="top"><br> <img src="Grafiken/Beamtrap.jpg" width="200" height="136"></td> </tr> <tr> <td height="117" valign="top" class="Stil8"><div align="center">Electrode made of Gold </div></td> </tr> </table></td> </tr> <tr> <td height="330" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong>Electron emitter:</strong></p> <p class="Stil8">To generate free electrons, electron emitters are required in electron optics. By the use of micro tips with tip radii of less than 10 nm field emitter can be fabricated, which already emit at low voltages.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Tip radii: a few 10 nm </li> <li class="Stil8">Material: e.g. Silicon and Silicon with additional layers</li> </ul> <p class="Stil8">Technology and competencies</p> <ul> <li class="Stil8"> <a href="microneedles.php" target="_top">Micro tips</a> </li> <li class="Stil8"> <a href="thin film deposition.php" target="_top">Thin film deposition</a> </li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="177" valign="top"><br> <img src="Grafiken/Koaxspitze.jpg" width="200" height="150"></td> </tr> <tr> <td height="153" valign="top" class="Stil8"><div align="center">Micro tip with coverage works as electron emitter</div></td> </tr> </table></td> </tr> <tr> <td height="33"> </td> </tr> </table></td> <td width="30" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1164"> </td> </tr> </table></td> <td width="200"> </td> </tr> <tr> <td height="6"></td> <td></td> <td></td> <td></td> </tr> </table> </body>