Micromotive MEMS -> Micro optics: Apertures and Encoder discs, Optical gratings, Deep UV optics, Anti reflection coating

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</td> <td width="45" valign="top"> <table width="45" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="45" height="22" align="center" valign="middle" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Contact.php" target="_top" style="text-decoration:none;">Contact</a></span></div></td> </tr> </table> </td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="4" height="22" bgcolor="#CCCCCC"> </td> <td height="22" valign="middle" bgcolor="#CCCCCC"><div align="right" class="Stil2"><a href="Glossar.php" target="_blank" style="text-decoration:none;"><span class="Stil2"> </span>  </a></div></td> </tr> </table> </td> </tr> </table> </td> </tr> </table> </div> <table width="800" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="100" height="20" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="100" height="20" bgcolor="#E6C864"> </td> </tr> </table> </td> <td width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1507"> </td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td width="640" height="92" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="40" colspan="8" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>   Micro optics</b></font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="8"> <hr size="2" noshade> </td> </tr> </table> </td> </tr> <tr> <td height="300" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="3" valign="top"><p class="Stil8"> <strong>Optical apertures and encoder disks:</strong></p> <p class="Stil8">By structuring a metal layer on a glass substrate we can fabricate transmission apertures or code discs for encoders with any design.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Minimum feature size: about 500 nm</li> <li class="Stil8">Substrate: e.g. Glass ~ 200 µm – some mm thickness</li> <li class="Stil8">· Material: e.g. Chromium and other metals</li> </ul> <p class="Stil8">Technology and Competencies</p> <ul> <li class="Stil8"> <a href="thin film deposition.php" target="_top">Thin film deposition</a></li> <li class="Stil8"><a href="photolithography.php" target="_top">Photo lithography</a></li> <li class="Stil8"> <a href="mems technologies.php" target="_top">Micro structuring</a></li> </ul></td> <td width="15" rowspan="3" valign="top"> </td> <td width="200" height="196" valign="top"><br> </td> </tr> <tr> <td height="30" valign="top" class="Stil8"><div align="center"></div></td> </tr> <tr> <td height="74"></td> </tr> </table></td> </tr> <td height="340" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong>Optical gratings:</strong></p> <p class="Stil8"> Also by patterning a metal layer on a glass substrate we can manufacture optical transmission gratings. In contrast, we make reflection gratings by etching the lattice structure into a silicon substrate. To increase the reflectivity these structures can also be metalized.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Minimum feature size: about 500 nm</li> <li class="Stil8">Substrate: e.g. glass for transmission gratings or coated silicon for reflection gratings</li> <li class="Stil8">Grid material: e.g. Chromium or other metals</li> </ul> <p class="Stil8">Technology and Competencies</p> <ul> <li class="Stil8"> <a href="thin film deposition.php" target="_top">Thin film deposition</a></li> <li class="Stil8"><a href="photolithography.php" target="_top">Photo lithography</a></li> <li class="Stil8"> <a href="mems technologies.php" target="_top">Micro structuring</a></li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="169" valign="top"><br> </td> </tr> <tr> <td height="171" valign="top" class="Stil8"><div align="center"></div></td> </tr> </table></td> </tr> <tr> <td height="330" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong>Deep UV Optics:</strong></p> <p class="Stil8">For light wavelengths below 300 nm, the optical transmission of some glasses decreas rapidly. One possibility to fabricate optical elements for this application such as apertures are etched structures where no material damps the light that passes the aperture. Such elements are available in silicon with our etching technology or can be made of metals by electroplating.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Usable Area: about 100 mm</li> <li class="Stil8">Material: silicon or metals </li> </ul> <p class="Stil8">Technology and Competencies</p> <ul> <li class="Stil8"><a href="silicon grids.php" target="_top">Silicon MEMS</a></li> <li class="Stil8"><a href="thin film deposition.php" target="_top">Micro electroplating</a></li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="169" valign="top"><br></td> </tr> <tr> <td height="161" valign="top" class="Stil8"><div align="center"></div></td> </tr> </table></td> </tr> <tr> <td height="150" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong>Anti reflective coating:</strong></p> <p class="Stil8">With our physical and chemical deposition processes, we can apply anti reflective coatings to metallic or transparent surfaces, that are optimized for a certain wavelength. This can reduce undesirable reflections from optical elements.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Optimized for discrete wavelengths</li> <li class="Stil8">Residual reflection: < 10% </li> </ul> <p class="Stil8">Technology and Competencies</p> <ul> <li class="Stil8"><a href="thin film deposition.php" target="_top">Thin film deposition</a></li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="169" valign="top"><br></td> </tr> <tr> <td height="161" valign="top" class="Stil8"><div align="center"></div></td> </tr> </table></td> </tr> <tr> <td height="46"> </td> </tr> </table></td> <td width="30" rowspan="1" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1507"> </td> </tr> </table></td> <td width="200"> </td> </tr> <tr> <td height="3"></td> <td></td> <td></td> <td></td> </tr> </table> </body>