Microfluidic channels:
Based on our silicon etching processes we manufacture micro fluidic channels, reservoirs and mixing structures in silicon substrates. For the connection of inlet and outlet pipes we etch holes through the chips. To seal the fluidic channels, the silicon chips are bonded anodically with a glass substrate. The use of silicon and glass makes the fluidic component chemically very inert and bio compatible.
Typical properties:
- Minimum feature size: about 500 nm
- Substrate: Silicon and Glass
Technology and competencies
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