Micromotive MEMS -> Nanoanalytics: Cantilever sensors, Atomic force sensors (AFM), Scanning nearfield optical microscopy sensors (SNOM)

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width="700" bgcolor="#FFFFFF"> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1120"> </td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td width="640" height="92" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="40" colspan="8" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>   Nanoanalytics</b></font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="8"> <hr size="2" noshade> </td> </tr> </table> </td> </tr> <tr> <td height="420" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="4" valign="top"><p class="Stil8"><strong>Atomic force sensors (AFM):</strong></p> <p class="Stil8">Based on our expertise in manufacturing of micro tips in combination with our technology to generate cantilever sensors we are able to produce customized atomic force sensors. Thus, we can create custom made single sensors or AFM arrays. The sensors can be made of materials such as silicon or silicon nitride, but may also be electrically conductive and have a wire bond on a PCB.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Tip heights: a few µm </li> <li class="Stil8">Material: Silicon, Silicon nitride, Silicon oxide, with metalization too</li> </ul> <p class="Stil8">Technology and competencies</p> <ul> <li class="Stil8"><a href="microneedles.php" target="_top">Micro tips</a></li> <li class="Stil8"><a href="photolithography.php" target="_top">Photo lithography</a></li> <li class="Stil8"><a href="silicon microstructures.php" target="_top">Silicon MEMS</a></li> </ul></td> <td width="15" rowspan="4" valign="top"> </td> <td width="200" height="177" valign="top"><br> <img src="Grafiken/AFM%20200.jpg" width="200" height="150"></td> </tr> <tr> <td height="35" valign="top" class="Stil8"><div align="center">Silicon AFM sensor</div></td> </tr> <tr> <td height="168" valign="top" class="Stil8"><img src="Grafiken/4punkt%20auf%20PCB.jpg" width="200" height="160"></td> </tr> <tr> <td height="40" valign="top" class="Stil8"><div align="center">4 Tips conductive AFM sensor</div></td> </tr> </table></td> </tr> <td height="390" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="4" valign="top"><p class="Stil8"><strong>Near field optical sensors (SNOM):</strong></p> <p class="Stil8">In addition to mechanical force sensors, we are also able to produce near field optical sensors. These consist of an optically transparent core which is coated with an optically dense metalization. Only the front tip is free of metal, so that light can leak onto the sample.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Diameter of aperture: about 100 nm </li> <li class="Stil8">Optical connection: via glass fiber</li> </ul> <p class="Stil8">Technology and competencies</p> <ul> <li class="Stil8"><a href="microneedles.php" target="_top">Micro tips</a></li> <li class="Stil8"><a href="photolithography.php" target="_top">Photo lithography</a></li> <li class="Stil8"> <a href="microassambly.php" target="_top">Micro assembly</a></li> </ul></td> <td width="15" rowspan="4" valign="top"> </td> <td width="200" height="167" valign="top"><br> <img src="Grafiken/Fibertip%20200.jpg" width="200" height="140"></td> </tr> <tr> <td height="40" valign="top" class="Stil8"><div align="center">SNOM-Sensor on a glass fiber</div></td> </tr> <tr> <td height="158" valign="top" class="Stil8"><img src="Grafiken/Aperturspitze.jpg" width="200" height="150"></td> </tr> <tr> <td height="34" valign="top" class="Stil8"><div align="center">Aperture tip</div></td> </tr> </table></td> </tr> <tr> <td height="297" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"><strong>Cantilever sensors:</strong></p> <p class="Stil8">Our experience in manufacturing of cantilever sensors enables us to implement customer specific requirements. So we can fabricate cantilever in any geometry out of silicon, silicon dioxide or silicon nitride. Cantilever thicknesses can start already at 500 nm. Also heated cantilever can be fabricated out of silicon.</p> <p class="Stil8">Typical properties:</p> <ul> <li class="Stil8">Cantilever thickness: about 500 nm – some µm </li> <li class="Stil8">Material: Silicon, Silicon nitride, Silicon dioxide</li> </ul> <p class="Stil8">Technology and competencies</p> <ul> <li class="Stil8"> <a href="photolithography.php" target="_top">Photo lithography</a></li> <li class="Stil8"> <a href="silicon microstructures.php" target="_top">Silicon MEMS</a></li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="203" valign="top"><br> <img src="Grafiken/Cantilever%20Array.jpg" width="200" height="176"></td> </tr> <tr> <td height="120" valign="top" class="Stil8"><div align="center">Canitlever-Array-Sensor </div></td> </tr> </table></td> </tr> <tr> <td height="22"></td> </tr> </table></td> <td width="30" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1120"> </td> </tr> </table></td> <td width="200"> </td> </tr> <tr> <td height="30"> </td> <td> </td> <td> </td> <td> </td> </tr> </table> </body>