Micromotive - Mikrotechnik > Technologie

<body bgcolor="#FFFFFF" text="#000000"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#FFFFFF"> <tr> <td width="800"> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#D3DDFF"> <tr> <td height="20" valign="top" bgcolor="#CCCCCC" width="84"><a href="index_e.php" target="_top"><img src="Grafiken/English_d.GIF" width="84" height="20" border="0" name="English"></a></td> <td valign="middle" width="1" align="right" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td valign="middle" width="54" id="Home" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="index.php" target="_top"><img src="Grafiken/Home_d.gif" width="54" height="20" border="0" name="Home" alt="Home"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="104" valign="middle" id="Unternehmen" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Unternehmen.php" target="_top"><img src="Grafiken/Unternehmen_d.gif" width="104" height="20" border="0" name="Unternehmen" alt="Unternehmen"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="101" valign="middle" id="Mikrotechnik" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Mikrotechnik.php" target="_top"><img src="Grafiken/Mikrotechnik_d.gif" width="101" height="20" border="0" name="Mikrotechnik" alt="Mikrotechnik"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="98" valign="middle" id="Technologie" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Technologie.php" target="_top"><img src="Grafiken/Technologie_l.gif" width="98" height="20" border="0" name="Technologie" alt="Technologie"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="75" valign="middle" id="Produkte" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Produkte.php" target="_top"><img src="Grafiken/Produkte_d.gif" width="75" height="20" border="0" name="Produkte" alt="Produkte"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="107" valign="middle" id="Applikationen" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Applikationen.php" target="_top"><img src="Grafiken/Applikationen_d.gif" width="107" height="20" border="0" name="Applikationen" alt="Applikationen"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="65" valign="middle" id="Service" align="center" bgcolor="#CCCCCC"><font face="Verdana, Arial, Helvetica, sans-serif" size="3"><a href="Service.php" target="_top"><img src="Grafiken/Service_d.gif" width="65" height="20" border="0" name="Service" alt="Service"></a></font></td> <td width="1" valign="middle" bgcolor="#CCCCCC"><img src="Grafiken/vertstrich.gif" width="1" height="10"></td> <td width="66" valign="middle" id="Kontakt" align="center" bgcolor="#CCCCCC"> <p><a href="Kontakt.php" target="_top"><img src="Grafiken/Kontakt_d.gif" width="66" height="20" border="0" name="Kontakt" alt="Kontakt"></a></p> </td> </tr> </table> </td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="56" valign="top"> </td> <td colspan="9" valign="top"> <font face="Arial, Helvetica, sans-serif" size="6" color="#999999">Technologie</font> <hr size="2" noshade> </td> <td width="20"></td> </tr> <tr> <td height="20" colspan="2" valign="top"> </td> <td valign="top" align="left" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Standardprozesse.php" style="text-decoration:none; color:#FFFFFF " target="_top"><font color="#000000">> Standardprozesse</font></a></font></b></font></td> <td valign="top" align="left" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Siliziumtechnik.php" style="text-decoration:none; color:#FFFFFF " target="_top"><font color="#000000">> Siliziumtechnik</font></a> </font></b></font></td> <td valign="top" colspan="2"><b><font size="2" face="Arial, Helvetica, sans-serif"><a href="SU8.php" style="text-decoration:none; color:#FFFFFF " target="_top"><font color="#000000">> Dickschichttechnik</font></a></font></b></td> <td width="10"></td> <td width="156"></td> <td></td> </tr> <tr> <td height="20" colspan="3" valign="top"> </td> <td valign="top" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Mikrospitzen.php" style="text-decoration:none; color:#FFFFFF " target="_top"><font color="#000000">> Mikrospitzen</font></a></font></b></font></td> <td valign="top" colspan="2"><font face="Arial, Helvetica, sans-serif" size="2"><b><a href="Planartechnik.php" style="text-decoration:none; color:#FFFFFF " target="_top"><font color="#000000">> Planartechnik</font></a></b></font></td> <td valign="top" colspan="2"><font size="2"><b><font face="Arial, Helvetica, sans-serif"><a href="Mikromontage.php" style="text-decoration:none; color:#FFFFFF " target="_top"><font color="#000000">> Mikromontage</font></a></font></b></font></td> <td></td> <td></td> </tr> <tr> <td height="14"></td> <td width="12"></td> <td width="13"></td> <td width="132"></td> <td width="14"></td> <td width="116"></td> <td width="14"></td> <td width="133"></td> <td></td> <td></td> <td></td> </tr> </table> <table width="660" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="40" height="20"></td> <td width="600"></td> <td width="20"></td> </tr> <tr> <td height="85"></td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td height="20" valign="middle" colspan="2"> <h4><font face="Arial, Helvetica, sans-serif">Standardprozesse</font></h4> </td> </tr> <tr> <td height="65" valign="top" colspan="2"> <div align=justify> <font color=#000000 size=2 face="Thaoma, Arial, Helvetica, sans-serif"> Unser Leistungsspektrum umfasst alle notwendigen Aspekte der erfolgreichen Integration der Mikrotechnik in Ihr Produkt.</font> </div> </td> </tr> </table> </td> <td></td> </tr> <tr> <td height="474"></td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr> <td width="10" height="444" valign="top"> </td> <td width="234" valign="top"> <div align=justify> <font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"> <b>Lithografie</b></font></div> <ul> <li><font size="2" face="Arial, Helvetica, sans-serif" color="#000000">Justierte Kontaktbelichtung</font></li> <li> <font face="Arial, Helvetica, sans-serif" size="2" color="#000000">Beidseitige Belichtung</font></li> <li><font size="2" face="Arial, Helvetica, sans-serif" color="#000000">Positiv-/ negativ Resist</font></li> <li><font size="2" face="Arial, Helvetica, sans-serif" color="#000000">Lift-Off Resist</font></li> <li><font face="Arial, Helvetica, sans-serif" size="2" color="#000000">Auflösungsgrenze < 1 Mikrometer</font></li> </ul> <div align=justify> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"> <b>Beschichtung</b></font></h5> </div> <ul> <li> <div align=justify><font color="#000000" size="2" face="Arial, Helvetica, sans-serif">PECVD</font></div> </li> <li><font face="Arial, Helvetica, sans-serif" size="2" color="#000000">Thermische Oxidation </font></li> <li><font face="Arial, Helvetica, sans-serif" size="2" color="#000000">Aufdampfen</font></li> <li><font face="Arial, Helvetica, sans-serif" size="2" color="#000000">Sputtern</font></li> </ul> <div align=justify> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"> <b>Ätzen (nass und trocken)</b></font></h5> </div> <ul> <li> <div align=justify><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif">Metalle</font></div> </li> <li><font face="Thaoma, Arial, Helvetica, sans-serif" size="2" color="#000000">Silizium</font></li> <li><font face="Thaoma, Arial, Helvetica, sans-serif" size="2" color="#000000">SiO2; Si3N4; SiC</font></li> </ul> <div align=justify> <h5><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif"> <b>Analytik</b></font></h5> </div> <ul> <li> <div align=justify><font color="#000000" size="2" face="Thaoma, Arial, Helvetica, sans-serif">REM/ EDX</font></div> </li> <li><font face="Thaoma, Arial, Helvetica, sans-serif" size="2" color="#000000">AFM</font></li> </ul> </td> <td width="10" valign="top"> </td> <td width="346" valign="top"><img src="Grafiken/Chip.jpg" width="346" height="251" alt="Chip mit Mikrostrukturen"></td> </tr> <tr> <td height="30"></td> <td></td> <td></td> <td></td> </tr> </table> </td> <td></td> </tr> </table> </body>