MEMS Applications
Micro fabrication can be used for a vast variety of applications like micro optics, electron optics, x-ray optics, micro fluidics, micro mechanics, and nano analytics. We fabricate on your demand suitable for your application.
Micro Optics
We fabricate micro optical elements like apertures, optical encoders or optical gratings by patterning of metallic layers on optical transparent substrates. For wave lengths where the transparency of glass is to low elements like apertures or grids can be made of etched silicon.
Electron Optics
Grids as electron optical energy filter can be made of silicon or metal with bars having high aspect ratios to achieve a high electron transparency. Electrodes with user defined design can also be made of silicon or metals. Our micro tips with radii of a few nanometer can be used as electron emitters for instance.
X-Ray Optics
X-ray optical apertures can made of gold for instance. They are either self supporting or fabricated on an x-ray transparent membrane. Scattered light absorbers are also made of gold or of silicon deposited with an absorbing material. They have bars with high aspect ratios to achieve good scattered light absorption while having high transparency.
Micro Fluidics
We fabricate micro fluidic features like channels, reservoirs, mixer and filter usually in silicon. Sealing is done by anodic bonding of glass and silicon.
Mechanical Micro Components
We fabricate micro mechanical elements like gear parts, grippers or springs usually by elecrtoplating of metals like nickel. We also fabricate adjustment elements by electroplating of metal, silicon or plastic is also used.
Nano Analytics
We fabricate cantilever sensors with thicknesses beginning at a few 100nm out of silicon, silicon nitride or silicon dioxide. We fabricate single cantilever chips as well as cantilever arrays. We can integrate mechanical micro tips or optical transparent micro tips. Also heating elements can be integrated.