Based on our technology we develop and fabricate micro electro mechanical parts (MEMS). In addition to our basic technologies we have large experience in a vast field of MEMS processing. This enables us to achieve your aims with a minimum of time and effort.
By the combination of different structuring processes for silicon we are able to fabricate complex micro components. Structuring in different levels from both sides is possible as well as piercing the complete part. The specific material properties of silicon allows a wide field of applications: Optics, Electronoptics, Microfluidics, precise adjustment elements, embossing dies etc.
Silicon grids can cover large apertures while having very thin bars. These grids can be manufactured without ridges and are suitable therefor for electron optical applications. Also meshes for biotechnological applications are possible.
Our knowledge in the fabrication of micro needles enables us to fabricate needles out of silicon as well as needles out of optical transparent materials. These needles can have an additional metallic or dielectric coverage that is selectively opened at the very apex.
We fabricate membranes out of plastic, silicon, silicon nitride or metals. These membranes can span large areas and also bear features that fulfill electrical, optical, thermal or fluidic functions.
SU-8 is a photoplastic that allows the fabrication of user defined micro plastic components. These plastic components can be multi leveled.
Metallic micro components are very suitable for mechanical components like gear parts, springs, grippers and contact pins due to there mechanical properties. The low electrical resistance also allows the fabrication of electrical components like micro coils, rf-antennas and electrodes.