Micromotive Mikrotechnik -> Elektronenoptik: Elektronenoptische Gitter, Elektrodenstrukturen, Elektronenemitter

<body> <table width="100%" border="0" cellpadding="0" cellspacing="0" bgcolor="#D3DDFF"> <tr> <td> <table width="800" border="0" cellpadding="0" cellspacing="0" bgcolor="#CCCCCC">  <tr> <td width="81" height="20" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="81" height="20" bgcolor="#CCCCCC"><div align="right"><span class="Stil1"><a href="index_e.php" target="_top" style="text-decoration:none;">English</a></span></div></td> </tr> </table> </td> <td width="7" valign="top"> <table width="7" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="3" height="20" bgcolor="#CCCCCC"> </td> <td width="1" height="20" bgcolor="#CCCCCC"><div align="center"><img src="Grafiken/vertstrich.gif" width="1" height="10"></div></td> <td width="3" height="20" bgcolor="#CCCCCC"> </td> </tr> </table> </td> <td width="69" valign="top"> <table width="69" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="69" height="20" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="index.php" target="_top" style="text-decoration:none;">Willkommen</a></span></div></td> </tr> </table> </td> <td width="7" valign="top"> <table width="7" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="3" height="20" bgcolor="#CCCCCC"> </td> <td width="1" height="20" bgcolor="#CCCCCC"><div align="center"><img src="Grafiken/vertstrich.gif" width="1" height="10"></div></td> <td width="3" height="20" bgcolor="#CCCCCC"> </td> </tr> </table> </td> <td width="107" valign="top"> <table width="107" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="107" height="20" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Leistung.php" target="_top" style="text-decoration:none;">Leistungsspektrum</a></span></div></td> </tr> </table> </td> <td width="7" valign="top"> <table width="7" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="3" height="20" bgcolor="#CCCCCC"> </td> <td width="1" height="20" bgcolor="#CCCCCC"><div align="center"><img src="Grafiken/vertstrich.gif" width="1" height="10"></div></td> <td width="3" height="20" bgcolor="#CCCCCC"> </td> </tr> </table> </td> <td width="77" valign="top"> <table width="77" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="77" height="20" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Kompetenzen.php" target="_top" style="text-decoration:none;">Kompetenzen</a></span></div></td> </tr> </table> </td> <td width="7" valign="top"> <table width="7" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="3" height="20" bgcolor="#CCCCCC"> </td> <td width="1" height="20" bgcolor="#CCCCCC"><div align="center"><img src="Grafiken/vertstrich.gif" width="1" height="10"></div></td> <td width="3" height="20" bgcolor="#CCCCCC"> </td> </tr> </table> </td> <td width="68" valign="top"> <table width="68" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="68" height="20" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Technologie.php" target="_top" style="text-decoration:none;">Technologie</a></span></div></td> </tr> </table> </td> <td width="7" valign="top"> <table width="7" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="3" height="20" bgcolor="#CCCCCC"> </td> <td width="1" height="20" bgcolor="#CCCCCC"><div align="center"><img src="Grafiken/vertstrich.gif" width="1" height="10"></div></td> <td width="3" height="20" bgcolor="#CCCCCC"> </td> </tr> </table> </td> <td width="79" valign="top"> <table width="79" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="79" height="20" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Anwendung.php" target="_top" style="text-decoration:none;">Anwendungen</a></span></div></td> </tr> </table> </td> <td width="7" valign="top"> <table width="7" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="3" height="20" bgcolor="#CCCCCC"> </td> <td width="1" height="20" bgcolor="#CCCCCC"><div align="center"><img src="Grafiken/vertstrich.gif" width="1" height="10"></div></td> <td width="3" height="20" bgcolor="#CCCCCC"> </td> </tr> </table> </td> <td width="50" valign="top"> <table width="50" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="50" height="20" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Produkte.php" target="_top" style="text-decoration:none;">Produkte</a></span></div></td> </tr> </table> </td> <td width="7" valign="top"> <table width="7" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="3" height="20" bgcolor="#CCCCCC"> </td> <td width="1" height="20" bgcolor="#CCCCCC"><div align="center"><img src="Grafiken/vertstrich.gif" width="1" height="10"></div></td> <td width="3" height="20" bgcolor="#CCCCCC"> </td> </tr> </table> </td> <td width="42" valign="top"> <table width="42" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="42" height="20" bgcolor="#CCCCCC"><div align="center"><span class="Stil2"><a href="Kontakt.php" target="_top" style="text-decoration:none;">Kontakt</a></span></div></td> </tr> </table> </td> <td valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td height="20"> </td> </tr> </table> </td> </tr> </table> </td> </tr> </table> <table width="900" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1164"> </td> <td width="640" valign="top"> <table width="640" border="0" cellpadding="0" cellspacing="0">  <tr valign="top"> <td width="640" height="92" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="40" colspan="8" valign="top" nowrap> <h1><font face="Arial, Helvetica, sans-serif" color="#999999" size="6" ><b>    Elektronenoptik</b></font></h1></td> </tr> </table> <table width="100%" border="0" cellpadding="0" cellspacing="0"> <tr valign="top"> <td height="2" valign="top" colspan="8"> <hr size="2" noshade> </td> </tr> </table> </td> </tr> <tr> <td height="310" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong> Gitter als elektronenoptisches Element:</strong> </p> <p class="Stil8"> Zur Beschleunigung von freien Elektronen im Vakuum oder zum Aufbau von Energiefiltern werden in der Elektronenoptik Gitter eingesetzt. Mikrotechnisch gefertigte Elektronengitter bieten den Vorteil, dass sie mit sehr geringen Stegdurchmessern eine hohe Elektronentransmission erlauben. </p> <p class="Stil8"> Typische Eigenschaften </p> <ul> <li class="Stil8"> Kleinste Stegbreite: ca. 1µm </li> <li class="Stil8">Maximaler Durchmesser: ~100 mm</li> <li class="Stil8"> Material: z.B. Silizium, Kupfer, Gold </li> </ul> <p class="Stil8"> Technologie und Kompetenzen </p> <ul> <li class="Stil8"><a href="Fotolithografie.php" target="_top">Lithographie</a></li> <li class="Stil8"> <a href="Siliziumgitter.php" target="_top">Siliziumgitter</a></li> <li class="Stil8"> <a href="Beschichtung.php" target="_top">Mikrogalvanik</a> </li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="164" valign="top"><br> <img src="Grafiken/Goldgrid.jpg" width="200" height="137"></td> </tr> <tr> <td height="146" valign="top" class="Stil8"><div align="center">Elektronengitter aus Gold </div></td> </tr> </table></td> </tr> <td height="280" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong> <strong> <strong> Elektrodenstrukturen</strong> :</strong></strong></p> <p class="Stil8"> Zur Erzeugung gezielter Potentialverteilungen in der Elektronenoptik werden Elektrodenstrukturen benötigt. Durch mikrogalvanische Abscheidung sind wir in der Lage komplexe Elektrodengeometrien zu realisieren. </p> <p class="Stil8"> Typische Eigenschaften </p> <ul> <li class="Stil8"> Elektrodendicken: wenige µm bis einige 100 µm </li> <li class="Stil8"> Material: z.B. Silizium, Kupfer, Gold </li> </ul> <p class="Stil8"> Technologie und Kompetenzen </p> <ul> <li class="Stil8"> <a href="Fotolithografie.php" target="_top">Lithographie</a></li> <li class="Stil8"><a href="Silizium%20MEMS.php" target="_top">Siliziumtechnik</a></li> <li class="Stil8"><a href="Beschichtung.php" target="_top">Mikrogalvanik</a></li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="163" valign="top"><br> <img src="Grafiken/Beamtrap.jpg" width="200" height="136"></td> </tr> <tr> <td height="117" valign="top" class="Stil8"><div align="center">Elektrodenstruktur aus Gold </div></td> </tr> </table></td> </tr> <tr> <td height="330" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="425" rowspan="2" valign="top"><p class="Stil8"> <strong> <strong> <strong> Elektronenemitter</strong> :</strong> </strong></p> <p class="Stil8"> Zur Erzeugung freier Elektronen werden in der Elektronenoptik sogenannte Elektronenemitter benötigt. Unter Verwendung der von uns hergestellten Mikrospitzen mit Spitzenradien von wenigen 10 nm lassen sich Feldemitter herstellen, die bereits bei geringen Spannungen emittieren.</p> <p class="Stil8"> Typische Eigenschaften </p> <ul> <li class="Stil8"> Spitzenradien: wenige 10 nm </li> <li class="Stil8"> Material: z.B. Silizium und Silizium beschichtet </li> </ul> <p class="Stil8"> Technologie und Kompetenzen </p> <ul> <li class="Stil8"> <a href="Mikrospitzen.php" target="_top">Mikrospitzen</a> </li> <li class="Stil8"> <a href="Beschichtung.php" target="_top">Beschichtung</a> </li> </ul></td> <td width="15" rowspan="2" valign="top"> </td> <td width="200" height="177" valign="top"><br> <img src="Grafiken/Koaxspitze.jpg" width="200" height="150"></td> </tr> <tr> <td height="153" valign="top" class="Stil8"><div align="center">Mikrospitze mit Ummantelung als Elektronenemitter </div></td> </tr> </table></td> </tr> <tr> <td height="33"> </td> </tr> </table></td> <td width="30" valign="top"> <table width="100%" border="0" cellpadding="0" cellspacing="0">  <tr> <td width="30" height="1164"> </td> </tr> </table></td> <td width="200" valign="top">  </td> </tr> <tr> <td height="6"></td> <td></td> <td></td> <td></td> </tr> </table> </body>